First of all, the working principle, structure type and advantages and disadvantages of turbomolecular pump are introduced. In order to utilize the turbomolecular pump to obtain a clean vacuum, a foreign-made dry mechanical pump is used as a foreline pump to form an oil-free vacuum system. However, at present, most turbo-molecular pumps in China use oil-sealed mechanical pumps as their fore-stage pumps to form an oil-vacuum system. If the operation is improper, it is difficult to avoid oil vapor reflux and contamination of the vacuum system. Using the oil system to obtain a clean vacuum, there are some effective measures to prevent backflow and successful operation experience at home and abroad. These users correct choice and use of turbo molecular pump oil system to obtain a clean vacuum, there is a certain reference value. Today, the modern semiconductor industry, more and more use of turbopumps. Equipment such as sputtering, etching, evaporation, implantation, molecular beam epitaxy, ion processing and the like all need to operate in a vacuum environment. In another example, electron microscopes, surface analysis instruments, residual gas analyzers and helium mass spectrometer leak detectors also often use turbo molecular pumps to vacuum. In addition, in the universe simulation equipment, nuclear fusion devices, solar collector tube coating production line are also used to large turbopumps or cryogenic pumps instead of oil diffusion pump system to prevent oil vapor pollution. Therefore, in recent ten years, turbopumps have been significantly improved and developed both at home and abroad. Turbomolecular pumps in the increasing use of dry-type pump has not yet a large number of popular and application of the case, and sometimes have to use oil-sealed mechanical pump turbopump for the foreline pump. Therefore, in view of this situation, it is very important to properly choose and operate the turbopump. Turbomolecular pump to clarify the characteristics and methods of use, the user is necessary. Turbomolecular pump structure and working principle Turbomolecular pump in the vertical and horizontal structure of the sub-points, as shown in Figure 1 (a, b) for the vertical pump structure diagram, Figure 2 is a horizontal pump schematic structure. Fig.1 (a) Schematic diagram of vertical turbo molecular pumpFig.1 (b) Schematic diagram of vertical turbo molecular pump with magnetic bearingFig.2 Intention of turbo molecular pump with horizontal turbo pump The working principle of turbo-molecular pump is very simple. When gas molecules collide with VP1 on a surface running at a speed of VB (400 m / s), they are carried around in the direction of the blade's motion, such as VP2. (Figure 3) A typical turbomolecular pump works in the molecular flow range. The inlet pressure can be extended from 1 × 10-3 Torr to 10-11 Torr. Turbomolecular pump blades at very high speeds, the gas molecules are continuously refracted, turning and compression, the gas molecules are compressed to the anterior leaflet column after the former stage pump discharge. Most of the typical foreline pump is a small oil seal rotary vane pump or dry mechanical pump. Figure 3 Turbomolecular pump works diagram This pump in the rotating turbine blade row called the rotor, is mounted on the shaft supported by the bearing. There are stationary turbine blades between the two rotor blade disks called the stator. It is installed in the pump housing, each pair of rotor and stator constitute a level of compression. Gas molecules through the pump inlet through the multi-stage leaf row compressed to the exit after the discharge, multi-stage compression can have a high compression ratio, it is at the entrance to obtain very low pressure (very high degree of vacuum).
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